Hangzhou Shalom EO supplies the LiNbO3 crystals boules or blanks and SAW wafers with diameter 3”, 4” and 6” , some typical SAW wafer modules are listed below, we have stocked wafers for some modules.
Table 1. LiNbO3 crystals boules or blanks
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Growth orientation
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X,Y,Z, Y36, Y41,Y45,Y64,Y128, Y135
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Diameter
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2.5”, 3”, 4”, 6” or customized
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Length
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<120mm
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Polishing
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Both end surfaces inspection polishing
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Note: the customized boules are available upon request.
Table 2. LiNbO3 SAW wafers of 3”, 4” and 6” diameter
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Orientation
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Diameter
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Thickness
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Surface finish
(+) plane (-) plane
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Surface processing
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Z-Cut
X-Cut
Y-Cut
36°Y –Cut
41°Y –Cut
45°Y -Cut
64°Y –Cut
128°Y –Cut
135°Y –Cut
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76.2mm
100.0mm
150.0mm
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0.25mm
0.35mm
0.50mm
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Mirror polished
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GC1000# or
GC2000#
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White or Pyro-free
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Note: The customized wafers are available upon request.
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LiNbO3 Crystals Specifications
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Crystals Orientations
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X,Y,Z, Y36, Y41,Y64,Y128, Y135
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Orientation Fluctuation
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±0.30°
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Diameter
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2.5", 3", 4" and 6", or customized
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Length
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50~100mm
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Curie Temp
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1142±3℃
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Orientation of First Reference Flat
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As required ±0.2 0
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Length of First Reference Flat
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32±2 mm (4＂),22±2 mm (3＂) inspection polished.
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Second Reference Flat
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Available if required, the length shall be 12±3 mm (4＂),10±3mm(3＂)
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Appearance
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Free of crack, pore, inclusion
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Note: the boules, blanks, polished wafers are available
Specifications for 3”/4”/5”/6” LN wafers
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Specifications for 3”/4”/5”/6” LN wafers
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Wafer Size
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3”
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4”
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5”
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6”
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Diameter(mm)
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76.2
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100mm
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125mm
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150mm
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Tolerance (±mm)
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0.25
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0.5
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0.5
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0.5
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Primary reference flat (mm)
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22mm or customized
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32.5mm or customized
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42.5mm or customized
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57.5mm or customized
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LTV (5x5mm) (μm)
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<2
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<2
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<2
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<2
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TTV (μm)
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<8
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<10
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<15
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<20
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Bow (μm)
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±20
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±25
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±40
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±40
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Warp(μm)
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≤30
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≤40
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≤50
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≤50
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PLTV (%) (5x5mm)
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≥90%
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≥90%
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≥90%
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≥90%
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Cutting Angle
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X,Y,Z, Y36, Y41,Y64,Y128, Y135
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Orientation Flat
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All available
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Surface Type
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Single side polished/Double sides polished
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Polished side Ra (nm)
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≤1
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Back Side Criteria (μm)
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Gerneral is 0.2-0.5 or as customized
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Edge Rounding
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Compliant with SEMI M1.2 Standard/refer to IEC62276
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Optical doped
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Fe/Zn/MgO ect. For optical grade LT wafers
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Appearance
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Contamination: None
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Particles Φ>0.3μm: ≤30
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Saw Marks, striations: None
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Scratch: None
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Cracks, crowsfeet, Saw marks, strains: None
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