Hangzhou Shalom EO supplies the LiTaO3 crystals boules and SAW wafers with diameter 3”, 4” and 6” , some typical SAW wafer modules are listed below, we have stocked wafers for some modules.
And the customized boules or wafers are available upon customer’s request.
Table 1. LiTaO3 crystals boules or blanks
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Growth orientation
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Z, Y36, Y42, X-112Y
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Diameter
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3”, 4”, 6” or customized
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Length
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<100mm
|
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Polishing
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Both end surfaces inspection polishing
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Note: the customized boules are available upon request.
Table 2. LiTaO3 SAW wafers of 3”, 4” and 6” diameter
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Orientation
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Diameter
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Thickness
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Surface finish
(+) plane (-) plane
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Surface processing
|
|
Z-Cut
36°Y –Cut
42°Y –Cut
X-112°Y –Cut
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76.2mm
100.0mm
150.0mm
|
0.25mm
0.35mm
0.50mm
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Mirror polished
|
GC1000# or
GC2000#
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White or Pyro-free
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Note: The customized wafers are available upon request.
LiTaO3 Crystals Specifications
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LiTaO3 Crystals Specifications
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|
Crystals Orientations
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X,Y,Z, Y36, Y42,Y48,X112 etc.
|
|
Orientation Fluctuation
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±0.30°
|
|
Diameter
|
2", 3", 4", 6" and cutomized |
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Length
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50~80mm
|
|
Curie Temp
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605±3℃
|
|
Orientation of First Reference Flat
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As required ±0.2 0
|
|
Length of First Reference Flat
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32±2 mm (4＂),22±2 mm (3＂) inspection polished.
|
|
Second Reference Flat
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Available if required, the length shall be 12±3 mm (4＂),10±3mm(3＂)
|
|
Appearance
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Free of crack, pore, inclusion
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Note: The boules, blanks, polished wafers are available.
Specifications for 3”/4” LT wafers
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Specifications for 3”/4” LT wafers
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|
Wafer Size
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3”
|
4”
|
6”
|
|
Diameter(mm)
|
76.2mm
|
100mm
|
150mm
|
|
Tolerance (±mm)
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0.25
|
0.5
|
0.5
|
|
Primary reference flat (mm)
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22mm or customized
|
32.5mm or customized
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57.5mm or customized
|
|
LTV (5x5mm) (μm)
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<2
|
<2
|
<2
|
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TTV (μm)
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<8
|
<10
|
<20
|
|
Bow (μm)
|
±20
|
±25
|
±40
|
|
Warp(μm)
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≤30
|
≤40
|
≤50
|
|
PLTV (%) (5x5mm)
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≥90%
|
≥90%
|
≥90%
|
|
Cutting Angle
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X,Y,Z, Y36, Y42,Y48,X112 etc.
|
|
Orientation Flat
|
All available
|
|
Surface Type
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Single side polished/Double sides polished
|
|
Polished side Ra (nm)
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≤1
|
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Back Side Criteria (μm)
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Gerneral is 0.2-0.5 or as customized
|
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Edge Rounding
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Compliant with SEMI M1.2 Standard/refer to IEC62276
|
|
Optical doped
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Fe/Zn/MgO ect. For optical grade LT wafers
|
|
Appearance
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Contamination: None
|
|
Particles Φ>0.3μm: ≤30
|
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Saw Marks, striations: None
|
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Scratches: None
|
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Cracks, crowsfeet, Saw marks, strains: None
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