300-900 nm Lithium Niobate Thin Films(LNOI)
300-900 nm Lithium Niobate Thin FIlms
1
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Single-crystal Lithium Niobate Thin Film
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SiO2
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LN, Silicon, Quartz or Fused Silica Substrates
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2
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Single-crystal Lithium Niobate Thin Film
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Eletrode
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SiO2
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Lithium Niobate Substrates
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3
|
Single-crystal Lithium Niobate Thin Film
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|
SiO2
|
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Eletrode
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Lithium Niobate Substrates
|
4
|
Single-crystal MgO-doped LN Thin Film
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SiO2
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MgO-doped LN Substrates
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Specification
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Top Functional Layer
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Diameter
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3, 4, 6 inches
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Orientation
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X, Z, Y, etc.
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Material
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LiNbO3
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Thickness
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300-900 nm
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Deep(optional)
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MgO
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Isolation Layer
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Material
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SiO2
|
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Thickness
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1000-4000nm
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Substrates
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Material
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Si, LN, Quartz, Fused Silica etc.
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Thickness
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400-500nm
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Optional Electrode Layer
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Material
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Pt, Au, Cr
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Thickness
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100-400 nm
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Structure
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Above or under SiO2 isolation layer
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