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Quartz (SiO2) Crystals and Wafers
Hangzhou Shalom EO offers the SAW grade quartz materials and wafers, advanced facilities are equipped for crystals growing, wafer cutting, wafer lapping, wafer polishing and wafer checking, all finished products are passed at Testing of curie Temp and QC inspections. The quartz crystals boules, crystals blanks, wafer blanks and polished wafers are available upon customer’s request.
Quartz Crystals Specifications
Quartz Crystals Specifications |
|
Materials |
both Pure Z and Y bar available |
synthetic Q Value |
min 1.8 , 2.4 to 3.0 mil IEC |
Etch channel density |
max 15/cm2 max100/cm2; max300/cm2 |
Stress |
No dark or discolored visible in polarized light |
Surface finishing |
#1000, #2000, #3000 , #4000, and Polished std |
Angle Tolerance |
ZZ': +/-15" +/-30", +/-1' +/-2' |
XX' |
+/-15 , +/-30' |
Cut type |
AT. BT. IT ,SC,....,etc. |
Freqency |
1Mhz up to 50 Mhz for AT-fundamental |
Size for round blank |
from 3.0 to 15.0 mm dia (with flat) |
Size for wafer |
2.0x8.0 (mm)~ 16x16(mm) |
SMD type |
2.5x3.0 above at Customer option. |
Flat |
as request the flat shall be prependicular to X axias within +/- 10 deg |
new developed |
SC-cut and LiTao3 blank & Convex blank(plano-convex) for SC-cut : theta angle: +/-30" and Phi angle : +/-3' |
Specifications for 3”/4”/5”/6” quartz wafers
Specifications for 3”/4”/5”/6” quartz wafers |
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Wafer Size |
3” |
4” |
5” |
6” |
Diameter(mm) |
76.2 |
100mm |
125mm |
150mm |
Tolerance (±mm) |
0.25 |
0.5 |
0.5 |
0.5 |
Primary reference flat (mm) |
22mm or customized |
32.5mm or customized |
42.5mm or customized |
57.5mm or customized |
LTV (5x5mm) (μm) |
<2 |
<2 |
<2 |
<2 |
TTV (μm) |
<8 |
<10 |
<15 |
<20 |
Bow (μm) |
±20 |
±25 |
±40 |
±40 |
Warp(μm) |
≤30 |
≤40 |
≤50 |
≤50 |
PLTV (%) (5x5mm) |
≥90% |
≥90% |
≥90% |
≥90% |
Cutting Angle |
AT36/ST42.75/X/Y/Z etc. |
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Orientation Flat |
All available |
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Surface Type |
Single side polished/Double sides polished |
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Polished side Ra (nm) |
≤1 |
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Back Side Criteria (μm) |
Gerneral is 0.2-0.5 or as customized |
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Edge Rounding |
Compliant with SEMI M1.2 Standard/refer to IEC62276 |
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Appearance |
Contamination |
None |
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Particles Φ>0.3μm |
≤30 |
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Saw Marks, striations |
None |
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Scratch |
None |
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Cracks, crowsfeet, Saw marks, strains |
None |
1. Physical properties of synthetic crystal quartz
Physical properties of synthetic crystal quartz |
|
Density, g/cm3 |
2.65 |
Melting point, °C |
1467 |
Thermal conductivity, W/(m x K) (T = 25°C) |
10.7 (parallel to axis Z) |
Thermal conductivity, W/(m x K) (T = 25°C) |
7.1 õ 10-6 (parallel to axis Z) |
Hardness (Mohs) |
7 |
Specific heat capacity, J/(kg x K) (T = 25°C) |
710 |
Specific heat capacity, J/(kg x K) (T = 25°C) |
4.34 (parallel to axis Z) |
Young's modulus (E), GPa |
4.34 (parallel to axis Z) |
Shear modulus (G), GPa |
31.14 |
Bulk modulus (K), GPa |
36.4 |
Chemical stability |
insoluble in water |
Elastic coefficients |
C11=87 C12=7 C44=58 C13=13 C14=18 C33=106 |
2. Synthetic crystal quartz refractive index vs wavelength
Synthetic crystal quartz refractive index vs wavelength |
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λ, μm |
n0 |
ne |
λ, μm |
n0 |
ne |
λ, μm |
n0 |
ne |
0.185 |
1.676 |
1.690 |
0.243 |
1.605 |
1.617 |
0.589 |
1.544 |
1.553 |
0.194 |
1.660 |
1.673 |
0.263 |
1.593 |
1.604 |
1.083 |
1.534 |
1.543 |
0.204 |
1.643 |
1.656 |
0.291 |
1.581 |
1.591 |
1.800 |
1.524 |
1.532 |
0.219 |
1.625 |
1.637 |
0.340 |
1.567 |
1.577 |
2.500 |
1.512 |
1.520 |
0.231 |
1.614 |
1.626 |
0.405 |
1.557 |
1.567 |
3.000 |
1.500 |
1.507 |
1. Materials
This material consists of single-crystal right-handed a-quartz artificially grown bars which is intended for use in fabrication of piezoelectric for such as timing freq control and frequency selection under hydro-thermal condition on a seed with its length along the Y axis. This cultured quartz crystal shall have nominal Q specification defined by followed grade: Grade Q-VALUE : Specification of the synthetic quartz crystal:
Specification of quartz crystal |
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Infrared absorption α 3585 |
≤ 0.024 |
≤ 0.024 |
≤ 0.05 |
≤ 0.05 |
Q x10 6 |
3.0 |
3.0 |
2.4 |
2.4 |
Inclusions density |
I |
I |
I |
I or II |
Etch channel density (strips/cm 2 ) |
≤10 |
≤30 |
≤100 |
≤100 |
2. Quality evaluation of synthetic quartz crystal
2.1 The amount of crystal defect and impurity in synthetic quartz crystal depends on growth rate, mineralizer and raw material. The growth rate affects greatly to the important properties such as infra-red absorption coefficient α, which correlates to Q value, and frequency –temperature characteristics. The larger growth rate causes increase in α, decrease in Q value, and dispersion in frequency-temperature characteristics.
2.2 The quality index of synthetic quartz crystal was originally a Q value, and a 5 MHz quartz crystal unit operated in 5th overtone mode was used to obtain the Q value. But it required laborious work to fabricate the 5 MHz crystal unit, so the index had been changed to the coefficient α instead of the Q value
3. Standard specification for synthetic quartz crystal
3.1 Twinning: There shall be no electrical or optical twinning in the usable region.
3.2 Strain: There shall be no strain contained both inside and surface of seed crystal as well as in a grown quartz crystal.
3.3 Cracks and fractures: There shall be no cracks, chippings or fractures in the usable region.
3.4 Inclusion density: The specification is in accordance with the IEC 60758.
Size range (μm) Grade |
Q’ty per cm3 |
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10 to 30 |
30 to 70 |
70 to 100 |
>100 |
|
Ia |
2 |
1 |
0 |
0 |
Ib |
3 |
2 |
1 |
1 |
I |
6 |
4 |
2 |
2 |
II |
9 |
5 |
4 |
3 |
III |
12 |
8 |
6 |
4 |
3.5 Infra-red quality indication: The specification is in accordance with the IEC 60758.
Grade |
Max. α3585 |
Estimated Q values (x 106) |
A |
0.015 |
3.8 |
A |
0.024 |
3.0 |
B |
0.050 |
2.4 |
C |
0.069 |
1.8 |
D |
0.100 |
1.4 |
3.6 Etch channel density: The specification is in accordance with the IEC 60758.
Grade |
Max. number per cm3 |
1 |
10 |
2 |
30 |
3 |
100 |
4 |
300 |
5 |
600 |
4. Specification for lumbered quartz crystal:
4.1 Angles:
5.1.1 Rotation angle of X-surface around Y-axis: 00°00’±15’
5.1.2 Rotation angle of X-surface around Z-axis: 00°00’±15’
4.2 Dimensional tolerance:
5.2.1 along X or Z axis:±0.1 mm
5.2.2 along Yaxis:±10 mm
4.3 Surface roughness: as customized ,lapped and polished are both available.