5-50 μm LT, LN, Quartz on Si
5-50 μm LT, LN, Quartz on Si
1
Single-crystal Lithium Tantalate Thin FIlm
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Silicon Substrates
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2
Single-crysstal Lithium Niobate Thin Film
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Silicon Substrates
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3
Single-crystal Quartz Thin Film
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Silicon Substrates
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Specification
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Top Functional Layer
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Diameter
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3, 4, 6 inches
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Orientation
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X, Y-42, Y-46.3, Z, etc.
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Material
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LiTaO3, LiTaO3, Quartz, etc.
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Thickness
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5-50μm
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Substrate
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Material
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Si
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Thickness
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230-500μm
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