5-50 μm LT, LN, Quartz on Si
5-50 μm LT, LN, Quartz on Si
1
|
Single-crystal Lithium Tantalate Thin FIlm
|
|
Silicon Substrates
|
2
|
Single-crysstal Lithium Niobate Thin Film
|
|
Silicon Substrates
|
3
|
Single-crystal Quartz Thin Film
|
|
Silicon Substrates
|
|
Specification
|
|
Top Functional Layer
|
|
Diameter
|
3, 4, 6 inches
|
|
Orientation
|
X, Y-42, Y-46.3, Z, etc.
|
|
Material
|
LiTaO3, LiTaO3, Quartz, etc.
|
|
Thickness
|
5-50μm
|
|
Substrate
|
|
Material
|
Si
|
|
Thickness
|
230-500μm
|